ALIO’s Hybrid Hexapod®

Unmatched precision, performance, and quality for 5 or 6 axis motion

The all-new HH-30D Hybrid Hexapod® is the industry’s only 6-DOF nano positioning device with +/-30 degrees Tip and Tilt travel.  This next generation Hybrid Hexapod® technology out performs ANY other Hexapod solution in the market. 

ALIO’s Hybrid Hexapod® takes a different approach to traditional 6 Degree of Freedom (6-DOF) positioning devices, and exhibits much higher performance at extremely competitive prices.  Rather than 6 independent legs (and 12 connection joints) ALIO’s approach combines a precision XY monolithic stage, tripod, and continuous rotation theta-Z axis to provide superior overall performance.

The combination of serial and parallel kinematics at the heart of ALIO’s 6-D Nano Precision® stages renders traditional hexapod kinematics obsolete, with orders-of-magnitude improvements in precision, path performance, speed, stiffness and a larger work envelope with virtually unlimited XY travel, and fully programmable tool center point locations.

ALIO’s Hybrid Hexapod® has less than 100 nm 3-Dimensional 6 axis Point Precision® repeatability, making it an essential  technology for mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors, and indeed all micro-machining projects.

Hybrid Hexapod datasheet

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Hybrid Hexapod

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